Portada

MODELLING OF MICROFABRICATION SYSTEMS IBD

SPRINGER
12 / 2010
9783642055362
Inglés

Sinopse

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

PVP
207,74